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Conferences > FiO > 2016 > JTh2A > JTh2A.1

Optical surface profilometry using Fresnel diffraction from a 2D array of reflective phase-steps

P. Asgari, Y. Pourvais, and A. Darudi

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Abstract

In this paper, a novel method is presented for optical surface profilometry, based on phase-step diffractometry. The technique combines the advantages of Hartamnn and Fizeau methods and is tolerant with environmental noises.

© 2016 Optical Society of America

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This paper was not presented at the conference
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