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Subwavelength Grating Athermal Mach-Zehnder Silicon Photonics Interferometer with Enhanced Fabrication Error Tolerance and Wide Spectral Range

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Abstract

We present an experimental validation of a broadband athermal Mach-Zehnder interferometer with subwavelength grating waveguide in one of the arms to increase its fabrication error tolerance, while achieving less than 10 pm/K thermal sensitivity.

© 2016 Optical Society of America

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