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Optomechanical Crystals Fabricated by a CMOS Foundry

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Abstract

Photonics crystal optomechanical cavities fabricated on a commercial CMOS-compatible foundry are demonstrated. Despite the limited foundry design rules we could achieve a ultra-high Q (9.1 × 105) photonic crystals and optomechanical crystal cavities with large coupling rate (g0 = 60 KHz).

© 2015 Optical Society of America

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