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Approaching the Abbe Limit in the Extreme Ultraviolet: Ultrafast Imaging Using a Compact High Average Power High Harmonic Source

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Abstract

We demonstrate high-resolution imaging below one wavelength in the extreme ultraviolet using high numerical aperture diffractive imaging. Our high-average power high harmonic source at 33nm wavelength provides sufficient flux for real-time imaging.

© 2015 Optical Society of America

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