A surface profilometer based on laser confocal feedback

Weiping Wang; Shulian Zhang

doi:10.1364/FIO.2015.FM1G.3

Frontiers in Optics 2015
OSA Technical Digest (online) (Optica Publishing Group, 2015),
paper FM1G.3
•https://doi.org/10.1364/FIO.2015.FM1G.3

A surface profilometer based on laser confocal feedback

Weiping Wang and Shulian Zhang

Frontiers in Optics 2015

San Jose, California United States
18–22 October 2015
ISBN: 978-1-943580-03-3

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Optical Fabrication and Testing (FM1G)

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W. Wang and S. Zhang, "A surface profilometer based on laser confocal feedback," in Frontiers in Optics 2015, OSA Technical Digest (online) (Optica Publishing Group, 2015), paper FM1G.3.

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Abstract

An optical surface profilometry method is developed based on microchip Nd:YVO₄ laser feedback and confocal technologies. The signal is detected using heterodyne approach to ensure environmental robustness and invulnerability to the laser instability.

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