3D Alignment Using a Chiral Phase Aperture Mask

Matthew R. Arnison; Tuan Q. Pham

doi:10.1364/FIO.2012.FTu3A.30

Frontiers in Optics 2012/Laser Science XXVIII
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper FTu3A.30
•https://doi.org/10.1364/FIO.2012.FTu3A.30

3D Alignment Using a Chiral Phase Aperture Mask

Matthew R. Arnison and Tuan Q. Pham

Frontiers in Optics 2012

Rochester, New York United States
14–18 October 2012
ISBN: 978-1-55752-956-5

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Poster Session I (FTu3A)

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M. R. Arnison and T. Q. Pham, "3D Alignment Using a Chiral Phase Aperture Mask," in Frontiers in Optics 2012/Laser Science XXVIII, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper FTu3A.30.

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Abstract

We propose an extension of alignment using image correlation to 3D, using a chiral phase aperture mask. Microscope simulations show a transverse accuracy of 1 nm and a depth accuracy of 3 nm.

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