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Thermally Tuned Resonant Optical Filters Fabricated in Amorphous Silicon

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Abstract

A thermo-optic tunable shallow-grating guided-mode resonance filter is designed and fabricated. The experimental filter has a spectral width of 7 nm and a tuning range of 13 nm with a tuning efficiency of 0.13 nm/°C.

© 2011 Optical Society of America

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