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Conferences > FiO > 2011 > FMJ > FMJ4

Inductively Driven, Electrodeless Z-Pinch Sources for EUV and Soft X-Ray Applications

Matthew Partlow, Steve Horne, and Don Smith

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Abstract

Z-pinch discharge plasmas can be inductively driven without the use of electrodes, producing photons in the range from ~ 1 to 120 nm. Our z-pinch light source has been utilized in soft x-ray (SXR) microscopy and extreme ultraviolet (EUV) lithography applications.

© 2011 Optical Society of America

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