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Dynamic Interferometry for On-Machine Metrology

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Abstract

A compact, vibration insensitive interferometer design that is well suited for measuring optics while mounted in-situ on polishing equipment is presented. The system employs a single frame phase sensor that permits acquisition in tens of microseconds to mitigate the effects of vibration or relative motion with the test part. The theory of operation is presented along with experimental test results, which characterize repeatability and precision under static and high-vibration conditions.

© 2010 Optical Society of America

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