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  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper FThN4
  • https://doi.org/10.1364/FIO.2009.FThN4

A Virtual-Interferometer Technique for Surface Metrology

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Abstract

We have demonstrated a novel technique for performing surface metrology within wavefront-feedback systems. By using wavefront sensing to measure surface gradients via displacements of an optic, we have reconstructed several surfaces with 40-nm RMS error.

© 2009 Optical Society of America

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