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Conferences > FiO > 2009 > FThK > FThK3
  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper FThK3
  • •https://doi.org/10.1364/FIO.2009.FThK3

High-Spatial-Resolution Quantum Well Intermixing Technique for All-Optical Nano-Device Fabrications

Chee-Wei Lee, Yicheng Lai, Yingyan Huang, Boyang Liu, and Seng-Tiong Ho

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Abstract

We present technique of achieving high spatial resolution quantum well intermixing in InP/InGaAsP-based quantum well structures. It utilizes submicron-width deeply-etched trench as diffusion-stopper during the intermixing. Results indicate <0.4 µm spatial control with >100 nm bandgap blueshift.

© 2009 Optical Society of America

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