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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper FWN1
  • https://doi.org/10.1364/FIO.2008.FWN1

Optical Metrology Requirements for Coherence-Preserving and Next-Generation X-Ray Mirrors

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Abstract

Nanometer focusing of nanometer wavelength x-rays produced by next-generation accelerator sources will require extraordinary control of wavefront errors introduced by reflective and refractive optics. Achieving this goal will require significant advances in metrology techniques.

© 2008 Optical Society of America

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