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  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper FThK5
  • https://doi.org/10.1364/FIO.2008.FThK5

Optically-Driven MEMS Deformable Mirrors via an Array of Photodetectors

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Abstract

We are in the process of developing an all optically driven, deformable mirror device through the integration of an array of photodetectors with an array of MEMS deformable mirror devices.

© 2008 Optical Society of America

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