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Optica Publishing Group
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest Series (Optica Publishing Group, 2004),
  • paper FTuG23
  • https://doi.org/10.1364/FIO.2004.FTuG23

Complex pupil function reconstruction at high NA using the extended Nijboer-Zernike diffraction theory

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Abstract

We have derived an analytical expression for the field components in the focal region of a high-numerical-aperture imaging system using the so-called extended Nijboer-Zernike diffraction theory. It will be shown that the transmission function of the imaging system and its aberrations can be derived from the through-focus intensity map.

© 2004 Optical Society of America

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