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A 3-D MEMS optical switch for OXCs

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Abstract

A large-scale, compact optical switch based on MEMS-tilt mirror arrays and free-space optics is described. The mirror fabricated by the SOI-bulk micromachining technology provides reliable switching, and the optics consists of low-cost, high-accurate polymer components. A prototype with 100-ch I/Os features a coupling loss of 4.0dB and switching time of 3ms.

© 2003 Optical Society of America

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