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Design of a Torsion Micromirrors in Silicon

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Abstract

We present a design torsion micromirror in silicon . It has been showed that micromirrors of 200x200 microns . Thus, we discuss the design by means of the fabrications process, which is done by the etching of silicon, layers of sacrifice, polysilicon and the manufacturing of CMOS circuits.

© 2003 Optical Society of America

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