Abstract
Maskless patterning of sol-gel fabricated TiO2-Au nanocomposite films was attempted using a SHG sheet beam of Q-switched Nd:YAG laser. Direct and indirect (via. glass substrate) irradiation produced a regular stripe pattern of the films. Irradiated regions were observed with SEM and AFM, and the mechanism of film removal was discussed.
© 2003 Optical Society of America
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