Abstract

With the increasing interest in polymer integrated optical devices, techniques for fabrication of polymer waveguides and gratings are of critical importance [1-3]. We are developing direct laser fabrication techniques for this application. The investigation of the device fabrication is carried out using 20 ns, 193 nm ArF and 100 fs Ti:Sapphire lasers. Nearly single-mode straight waveguides and gratings with a sub-micron period were fabricated by laser ablation of polymer films.

© 2003 Optical Society of America