Sensitivity analysis and tolerancing of Mid Wave IR metalenses

Lieven Penninck; Wouter Woestenborghs

doi:10.1364/FLATOPTICS.2021.FTu4A.4

OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT)
OSA Technical Digest (Optica Publishing Group, 2021),
paper FTu4A.4
•https://doi.org/10.1364/FLATOPTICS.2021.FTu4A.4

Sensitivity analysis and tolerancing of Mid Wave IR metalenses

Lieven Penninck and Wouter Woestenborghs

Flat Optics: Components to Systems 2021

Washington, DC United States
27 June–1 July 2021
ISBN: 978-1-943580-88-0

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Mid-infrared Metamaterials and Metasurfaces (FTu4A)

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L. Penninck and W. Woestenborghs, "Sensitivity analysis and tolerancing of Mid Wave IR metalenses," in OSA Optical Design and Fabrication 2021 (Flat Optics, Freeform, IODC, OFT), F. Capasso, W. Chen, P. Dainese, J. Fan, J. DeGroote Nelson, F. Duerr, J. Rogers, J. Rolland, P. Clark, R. Pfisterer, H. Rehn, S. Thibault, M. Jenkins, D. Wook Kim, and N. Trela-McDonald, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper FTu4A.4.

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Abstract

We analyze the sensitivity of mid IR metalenses to fabrication imperfections. We simulate the sensitivity of lens performance to imperfections in the fabrication of meta-atoms such as over/under etching, structure dimensions, and film thickness.

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