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Composition modulation of InGaAsP/InP grown by Metal-Organic Chemical-Vapor Deposition

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Abstract

Composition modulation is observed in epitaxial layer of InGaAsP/InP and P-InGaAsP/InP grown by MOCVD, and the modulation becomes more severe with increasing the thickness of epitaxial layer.

© 2014 Optical Society of America

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