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Conferences > EUVXRAY > 2016 > EM3A > EM3A.1

Storage ring based PEHG FEL for EUV lithography

Chao Feng, Bocheng Jiang, Zheng Qi, Haixiao Deng, and Zhentang Zhao

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Abstract

In this paper we consider a storage ring based phase-merging enhanced harmonic generation FEL for producing intense EUV radiation pulses, which may be useful for the EUV lithography.

© 2016 Optical Society of America

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