We review our recent work on spectroscopic sensing of carbon dioxide in the mid-infrarded region around 4.3 pm using suspended silicon waveguides. Our waveguides are built on standard silicon-on-insulator substrates and acheive high sensitivity to gas.

© 2020 The Author(s)

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription