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  • 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper eb_2_2

Deterministic integration of quantum dots into on-chip multi-mode interference couplers via in-situ electron beam lithography

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Abstract

On-chip quantum optical circuits offer superior performance and scalability compared to bulky optical setups. Additionally, the up-scaling of quantum systems will foster the realization of photonic quantum computers to outperform their classical counterparts. In this context, the deterministic integration of quantum emitters into on-chip photonic elements is crucial for the implementation of scalable on-chip quantum circuits. Recent activities in this field include hybrid QD-waveguides for enhanced photon in-coupling [1] and first, rather tedious steps towards the controlled integration of QDs using multistep-lithography [2] as well as AFM tip transfer [3].

© 2019 IEEE

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