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We demonstrated single-mode fluorinated polymer optical waveguides for Si photonics of chip-to-chip. We fabricated 7-cm-long optical waveguides and estimated the propagation loss by cut back method. They are 0.28/0.38dB/cm at 1310/1550 nm, respectively. The reliability and the heat resistance were also evaluated. The results show good performance.
© 2012 Optical Society of America
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