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Transparent Capacitive Micromachined Ultrasound Transducer Arrays for Multimodal Imaging Systems

Afshin Kashani Ilkhechi and Roger Zemp

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Abstract

We introduce transparent TOBE CMUT arrays for multimodal imaging systems, combining ultrasound with photoacoustic and optical imaging systems. We designed and fabricated a 128-element lambda-pitch transducers with high transparency ranging from visible to near-infrared.

© 2021 The Author(s)

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