Abstract

We propose a fast surface profiling measurement method using a color confocal microscope based on time-encoded spectroscopy. The chromatic confocal microscopy can acquire depth information at high speed because it does not require depth scanning. On the other hand, in chromatic confocal microscopy, depth information is obtained through the wavelength of the reflected light, which is difficult for wide field imaging. By applying time encoded spectroscopy technology, depth information can be obtained at high speed through time information of reflected light. As a result, we could obtain the 3D surface shape without scanning by measuring the reflected light through the CCD over time.

© 2019 SPIE/OSA