This paper deals with new technical trends in aspherical generation for micro/meso optical parts. New technologies for ultra-precision aspherical grinding and polishing of aspherical optical lenses and molding dies are introduced. They are a parallel grinding method and a fluctuation-free grinding method. A fluctuation-free ultra-precision aspherical surface generation system was developed to achieve these methods, and demonstrated excellent grinding results of high form accuracy of 25 nm, and ultra-smooth and uniform surface roughness of several nmRy. Furthermore, electrorheological fluid assisted micro-polishing is also introduced

© 2004 Optical Society of America

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