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Conferences > DOMO > 2004 > DTuA > DTuA4
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (Optica Publishing Group, 2004),
  • paper DTuA4
  • •https://doi.org/10.1364/DOMO.2004.DTuA4

Engineered diffusers for UV litography

Donald J. Schertler, Stephen Chakmakjian, G. Michael Morris, and Tasso R. M. Sales

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Abstract

Engineered diffusers are proposed for homogenization and shaping of pupil and field illumination distributions for UV lithography applications. Capabilities include arbitrary control of diffusion angle, arbitrary spatial distribution of scattered light (square, circular, rectangular, quadrupole, etc.), high transmission, and polarization conservation, without issues such as zero order or speckle.

© 2004 Optical Society of America

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