Diffractive and micro-optical components - 20 years later

Hans Peter Herzig

doi:10.1364/DOMO.2004.DSuA1

Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
OSA Technical Digest (Optica Publishing Group, 2004),
paper DSuA1
•https://doi.org/10.1364/DOMO.2004.DSuA1

Diffractive and micro-optical components - 20 years later

Hans Peter Herzig

Diffractive Optics and Micro-Optics 2004

Rochester, New York United States
10–13 October 2004
ISBN: 1-55752-779-2

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Applications I (DSuA)

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H. P. Herzig, "Diffractive and micro-optical components - 20 years later," in Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest (Optica Publishing Group, 2004), paper DSuA1.

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Abstract

Micro-optics includes a family of optical components that are fabricated by modern micromachining, such as optical lithography, direct laser and e-beam writing, reactive ion etching. The paper presents the development of micro-optics since the introduction of microfabrication techniques. We discuss what we have learned and present recent developments.

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