A polymer focusing grating coupler (FGC) was implemented on a slab waveguide using nanoscale UV-replication process. Numerical aperture (NA) and spot size was measured at 0.85 and 347 nm, respectively, from the polymer FGC having a minimum line width of 85 nm. The out-coupling efficiency was as competitive as 28 % although aberration induced distortion of the beam shape should be further reduced.

© 2004 Optical Society of America

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