Fabrication of three-dimensional photonic crystals by holographic lithography

Yuzo Ono; Kiyokatsu Ikemoto

doi:10.1364/DOMO.2002.DWB5

Diffractive Optics and Micro-Optics
OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2002),
paper DWB5
•https://doi.org/10.1364/DOMO.2002.DWB5

Fabrication of three-dimensional photonic crystals by holographic lithography

Yuzo Ono and Kiyokatsu Ikemoto

Diffractive Optics and Micro-Optics 2002

Tucson, Arizona United States
3–6 June 2002
ISBN: 1-55752-710-5

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Subwavelength Elements & Photonic Crystals (DWB)

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Y. Ono and K. Ikemoto, "Fabrication of three-dimensional photonic crystals by holographic lithography," in Diffractive Optics and Micro-Optics, R. Magnusson, ed., Vol. 75 of OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2002), paper DWB5.

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Abstract

Three-dimensional photonic crystals have been successfully fabricated in a photoresist by four-wave interference, where incident wave directions were set by considering the equation for interference fringe and that between lattice and reciprocal lattice vectors.

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