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Conferences > DOMO > 2002 > DTuD > DTuD11

Performance of Beam Energy Sampling Gratings Fabricated with E-Beam Direct Writing

Jingqin Su, Xiaofeng Wei, Chi Ma, Feng Jing, Fuhua Gao, Feng Gao, and Yongkang Guo

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Abstract

In this paper, a method to fabricate beam energy sampling grating is presented. We also fabricated the sample of the gratings and corresponding experiment was carried out, the results agreed with what we designed well.

© 2002 Optical Society of America

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