Abstract

The design, microfabrication and testing of hybrid micro-diffractive-refractive lens with continuous relief, which is used on laser diode for monomode fiber coupling, is discussed. The hybrid microlens with diameter as small as 65 µm and numerical aperture (N.A.) of 0.25 is fabricated directly onto a spherical surface using focused ion beam milling (FIBM) technology. Focused Ga⁺ ion beam is used to mill the continuous relief microstructure at an acceleration voltage of 50 kV. Measurement result shows that the one-step micromachining method is valid for practical use.

© 2002 Optical Society of America