Multifacet Kinoforms for KrF excimer laser

Dirk Schafer; Jiirgen Ihlemann; Gerd Marowsky; Berthold Burghardt; Marc Timm

doi:10.1364/DOMO.2000.DTuD27

Diffractive Optics and Micro-Optics
OSA Trends in Optics and Photonics (Optica Publishing Group, 2000),
paper DTuD27
•https://doi.org/10.1364/DOMO.2000.DTuD27

Multifacet Kinoforms for KrF excimer laser

Dirk Schafer, Jiirgen Ihlemann, Gerd Marowsky, Berthold Burghardt, and Marc Timm

Diffractive Optics and Micro-Optics 2000

Québec City Canada
18–22 June 2000
ISBN: 1-55752-635-4

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D. Schafer, J. Ihlemann, G. Marowsky, B. Burghardt, and M. Timm, "Multifacet Kinoforms for KrF excimer laser," in Diffractive Optics and Micro-Optics , T. Li, ed., Vol. 41 of OSA Trends in Optics and Photonics (Optica Publishing Group, 2000), paper DTuD27.

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Abstract

Fresnel-Kinoforms consisting of 121 sub-apertures are used for beam shaping and beam homogenization of partial coherent KrF excimer laser beams. Design and optical reconstruction are presented and discussed.

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