Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography

Martin Šarbort; Miroslava Hola; Jan Pavelka; Šimon Řeřucha; Jindřich Oulehla; Tomáš Fořt; Josef Lazar

doi:10.1364/DH.2020.HTh5H.2

Imaging and Applied Optics Congress
OSA Technical Digest (Optica Publishing Group, 2020),
paper HTh5H.2
•https://doi.org/10.1364/DH.2020.HTh5H.2

Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography

Martin Šarbort, Miroslava Hola, Jan Pavelka, Šimon Řeřucha, Jindřich Oulehla, Tomáš Fořt, and Josef Lazar

Digital Holography and Three-Dimensional Imaging 2020

Washington, DC United States
22–26 June 2020
ISBN: 978-1-943580-77-4

From the session
Applications of Digital Holography III (HTh5H)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
M. Šarbort, M. Hola, J. Pavelka, Š. Řeřucha, J. Oulehla, T. Fořt, and J. Lazar, "Comparison of Three Focus Sensors for Optical Measurement of Rough Surface Topography," in Imaging and Applied Optics Congress, OSA Technical Digest (Optica Publishing Group, 2020), paper HTh5H.2.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Get Video
Citation alert
Save article

Abstract

We compare three focus sensors designed for the optical topography measurement of rough surface specimens with submicron accuracy. The laser beam was modulated by three specific computer-generated holograms displayed on a spatial light modulator.

PDF Article | Presentation Video

More Like This

Comparison between laser stylus and contact stylus measurements on rough surfaces

Lars Mattsson and Pia Wågberg
SMB4 Surface Roughness and Scattering (SURS) 1992

Comparison of FBG and Interferometric Surface Mounted Optical Fibre Pressure Sensor

Laura F J Aime, Thomas Kissinger, Stephen W James, and Ralph P Tatam
W4.41 Optical Fiber Sensors (OFS) 2020

"Ultrasonic Measurements of Surface Roughness"

G.V. Blessing, J.C. Boudreaux, D.G. Eitzen, and J.A. Slotwinski
STuB1 Surface Roughness and Scattering (SURS) 1992

Previous Article Next Article

Presentation Video

Presentation video access is available to:

Optica Publishing Group subscribers
Technical meeting attendees
Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads