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Conferences > DH > 2019 > W4B > W4B.5

Label-free quantitative material sensitive tomography with extreme ultraviolet light

Felix Wiesner, Silvio Fuchs, Martin Wünsche, Jan Nathanael, Johann J. Abel, Julius Reinhard, Slawomir Skruszewicz, Christian Rödel, Annett Gawlik, Gabriele Schmidl, Uwe Hübner, Jonathan Plentz, and Gerhard G. Paulus

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Abstract

We report on quantitative material-sensitive cross-sectional imaging with nanoscale axial resolution. First experimental results show that in addition to the structural information element-specific identification of buried layers is possible.

© 2019 The Author(s)

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