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Frequency comb profilometer with high axial resolution using spatial matching method

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Abstract

We developed a new matching method for combining phase profiles obtained by a frequency comb profilometer and a conventional optical interferometer of an ultra-stable mode-locked frequency comb femtosecond laser for measuring a lager depth object. Employing the matching method, the limitations related to short measurement range of the optical interferometer and the low lateral resolution of the frequency comb profilometer were illuminated, it enabled the current system to implement profilometry with a micron-order lateral and nano-scale axial resolutions.

© 2017 Optical Society of America

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