Portable Spatially Incoherent Holography for Optical Profiling of Sharp-Edge Objects

Amit Nativ; Natan T. Shaked

doi:10.1364/DH.2016.DTh3C.5

Imaging and Applied Optics 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper DTh3C.5
•https://doi.org/10.1364/DH.2016.DTh3C.5

Portable Spatially Incoherent Holography for Optical Profiling of Sharp-Edge Objects

Amit Nativ and Natan T. Shaked

Digital Holography and Three-Dimensional Imaging 2016

Heidelberg Germany
25–28 July 2016
ISBN: 978-1-943580-15-6

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Metrology and Profilometry (DTh3C)

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A. Nativ and N. T. Shaked, "Portable Spatially Incoherent Holography for Optical Profiling of Sharp-Edge Objects," in Imaging and Applied Optics 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper DTh3C.5.

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Abstract

We present a compact and external common-path off-axis interferometer with spatially incoherent illumination, and demonstrate using it for profiling semiconductor silicon wafers with sharp-edge contacts.

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