d’Nanoimager and d’Holoscope - A Comparative Study for MEMS Metrology

Anand K. Asundi; Ruiqi Rachel Wang; Rosmin Elsa Mohan; Sarika Sugandhi

doi:10.1364/DH.2016.DTh3C.1

Imaging and Applied Optics 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper DTh3C.1
•https://doi.org/10.1364/DH.2016.DTh3C.1

d’Nanoimager and d’Holoscope - A Comparative Study for MEMS Metrology

Anand K. Asundi, Ruiqi Rachel Wang, Rosmin Elsa Mohan, and Sarika Sugandhi

Digital Holography and Three-Dimensional Imaging 2016

Heidelberg Germany
25–28 July 2016
ISBN: 978-1-943580-15-6

From the session
Metrology and Profilometry (DTh3C)

Open Access

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A. K. Asundi, R. R. Wang, R. E. Mohan, and S. Sugandhi, "d’Nanoimager and d’Holoscope - A Comparative Study for MEMS Metrology," in Imaging and Applied Optics 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper DTh3C.1.

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Abstract

A comparative study on the d’ Holoscope and d’Nanoimager from d’Optron Pte Ltd for several samples such as diamond turned micro bump, gold coated mirrors and a laser marked wafer is performed.

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