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Measurements of Squeeze Flow with Varying Temperature at UV-Nanoimprint via Micro Digital Holographic Particle Tracking Velocimetry

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Abstract

Measurements of flow field of UV curable resin at a press process accompanied by a heating of UV-NIL were carried out using micro-DHPTV system. The temperature dependence of UV curable resin was evaluated.

© 2015 Optical Society of America

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