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Conferences > DH > 2014 > DW1B > DW1B.1

Holographic Lithography

A. Purvis, J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, N. L. Seed, R. McWilliam, F. B. Soulard, and P. A. Ivey

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Abstract

This review summarises the work of the Durham-Sheffield, UK team working on Holographic Lithography over the last decade. It collates progress in 3D resolution and overall scale of the substrate wiring patterns designed and considers a range of approaches and applications.

© 2014 Optical Society of America

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