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Conferences > DH > 2012 > DTu2C > DTu2C.5

Time-Division Multiplexing of Iterated Holograms for Lithography on 3D Surfaces

J.J. Cowling, J.J. Toriz-Garcia, A. Purvis, R. McWilliam, G.L. Williams, F.B. Soulard, N.L. Seed, and P.A. Ivey

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Abstract

A 3D substrate is lithographically patterned using a set of holograms generated by a multi-plane iterative algorithm. The substrate is exposed to multiple phase-only holograms over the duration of an exposure, thus averaging noise.

© 2012 Optical Society of America

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