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Conferences > COSI > 2021 > CF2E > CF2E.7

Lens Aberration Calibration and Correction with Plasmonic Nanoparticles in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology

C. Messinis, T.T.M. van Schaijk, N. Pandey, A. Koolen, J.F. de Boer, S. Witte, and A.J. den Boef

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Abstract

We present a method to calibrate and correct lens aberrations in dark-field Digital Holographic Microscope (df-DHM). In this method a gold nanoparticle is used to measure the point-spread function (PSF) of the df-DHM.

© 2021 The Author(s)

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