Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > COSI > 2020 > CF4C > CF4C.6

Parallel Acquisition of Multiple Images Using Coherence Gating in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology

C. Messinis, T.T.M. van Schaijk, V.T. Tenner, J.F. de Boer, S. Witte, and A.J. den Boef

Not Accessible

Your library or personal account may give you access

Abstract

We present an Off-Axis dark-field digital holographic microscope capable of parallel acquisition of multiple holograms. With this microscope we aim to measure overlay (OV) with sub-nanometer precision and milli-second acquisition times over large wavelength range.

© 2020 The Author(s)

PDF Article  |   Presentation Video
More Like This
Lens Aberration Calibration and Correction with Plasmonic Nanoparticles in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology

C. Messinis, T.T.M. van Schaijk, N. Pandey, A. Koolen, J.F. de Boer, S. Witte, and A.J. den Boef
CF2E.7 Computational Optical Sensing and Imaging (COSI) 2021

Theoretical and Experimental Demonstration of a State-of- the-Art Dark-Field Holographic Microscope for Advanced Semiconductor Metrology

C. Messinis, V.T. Tenner, J.F. de Boer, S. Witte, and A.J. den Boef
CTu4C.4 Computational Optical Sensing and Imaging (COSI) 2019

Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy

M. Adhikary, T. Cromwijk, C. Messinis, J. de Wit, S. Konijnenberg, S. Witte, J. de Boer, and A. J. den Boef
JTh2A.8 3D Image Acquisition and Display: Technology, Perception and Applications (3D) 2022

View More...

Presentation Video

Presentation video access is available to:

  1. Optica Publishing Group subscribers
  2. Technical meeting attendees
  3. Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads

More Like This
Lens Aberration Calibration and Correction with Plasmonic Nanoparticles in Off-Axis Dark-Field Digital Holographic Microscope for Semiconductor Metrology

C. Messinis, T.T.M. van Schaijk, N. Pandey, A. Koolen, J.F. de Boer, S. Witte, and A.J. den Boef
CF2E.7 Computational Optical Sensing and Imaging (COSI) 2021

Theoretical and Experimental Demonstration of a State-of- the-Art Dark-Field Holographic Microscope for Advanced Semiconductor Metrology

C. Messinis, V.T. Tenner, J.F. de Boer, S. Witte, and A.J. den Boef
CTu4C.4 Computational Optical Sensing and Imaging (COSI) 2019

Improving the precision of semiconductor overlay measurements using dark-field digital holographic microscopy

M. Adhikary, T. Cromwijk, C. Messinis, J. de Wit, S. Konijnenberg, S. Witte, J. de Boer, and A. J. den Boef
JTh2A.8 3D Image Acquisition and Display: Technology, Perception and Applications (3D) 2022

View More...
Digital image correction methods using dark-field digital holographic microscopy for semiconductor metrology

Manashee Adhikary, Tamar Cromwijk, Sander Konijnenberg, Wim Coene, Stefan Witte, Johannes de Boer, and Arie den Boef
CM3B.5 Computational Optical Sensing and Imaging (COSI) 2023

Phase-resolved semiconductor overlay metrology with a dark field holographic microscope

V.T. Tenner, C. Messinis, and A.J. den Boef
M4B.7 Digital Holography and Three-Dimensional Imaging (DH) 2019

Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use