Complex Imaging Reflectometry for Dopant Profile Measurements using Tabletop High Harmonic Light

Michael Tanksalvala; Christina L. Porter; Yuka Esashi; Galen P. Miley; Naoto Horiguchi; Robert M. Karl; Peter Johnsen; Charles S. Bevis; Nicholas W. Jenkins; Bin Wang; Xiaoshi Zhang; Seth L. Cousin; Daniel E. Adams; Michael Gerrity; Henry C. Kapteyn; Henry C. Kapteyn; Margaret M. Murnane; Margaret M. Murnane

doi:10.1364/COSI.2019.CW3A.6

Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP)
OSA Technical Digest (Optica Publishing Group, 2019),
paper CW3A.6
•https://doi.org/10.1364/COSI.2019.CW3A.6

Complex Imaging Reflectometry for Dopant Profile Measurements using Tabletop High Harmonic Light

Michael Tanksalvala, Christina L. Porter, Yuka Esashi, Galen P. Miley, Naoto Horiguchi, Robert M. Karl, Peter Johnsen, Charles S. Bevis, Nicholas W. Jenkins, Bin Wang, Xiaoshi Zhang, Seth L. Cousin, Daniel E. Adams, Michael Gerrity, Henry C. Kapteyn, and Margaret M. Murnane

Computational Optical Sensing and Imaging 2019

Munich Germany
24–27 June 2019
ISBN: 978-1-943580-63-7

From the session
Advances in Ptychography and emerging applications (CW3A)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
M. Tanksalvala, C. L. Porter, Y. Esashi, G. P. Miley, N. Horiguchi, R. M. Karl, P. Johnsen, C. S. Bevis, N. W. Jenkins, B. Wang, X. Zhang, S. L. Cousin, D. E. Adams, M. Gerrity, H. C. Kapteyn, and M. M. Murnane, "Complex Imaging Reflectometry for Dopant Profile Measurements using Tabletop High Harmonic Light," in Imaging and Applied Optics 2019 (COSI, IS, MATH, pcAOP), OSA Technical Digest (Optica Publishing Group, 2019), paper CW3A.6.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

We present a tabletop-scale complex-imaging EUV reflectometer that uses grazing- incidence ptychographic imaging to non-destructively determine depth-dependent, spatially-resolved composition with high sensitivity to chemical makeup, thin film layer thickness, interface quality and dopant profiles.

PDF Article

More Like This

Ptychographic Phase-Sensitive Imaging Reflectometry for Depth-Resolved Nanostructure Characterization using Tabletop EUV Light

Nicholas W. Jenkins, Michael Tanksalvala, Yuka Esashi, Christina L. Porter, Bin Wang, Naoto Horiguchi, Matthew N. Jacobs, Michael Gerrity, Henry C. Kapteyn, and Margaret M. Murnane
EW3A.4 Compact EUV & X-ray Light Sources (EUVXRAY) 2020

Sub-wavelength Resolution, Wide Field-Of-View, and Quantitative 13nm Imaging in Reflection and Transmission with a Tabletop High Harmonic Source

Christina L. Porter, Michael Tanksalvala, Dennis Gardner, Giulia Mancini, Michael Gerrity, Galen P. Miley, Xiaoshi Zhang, Naoto Horiguchi, Elisabeth Shanblatt, Benjamin Galloway, Yuka Esashi, Charles S. Bevis, Robert Karl, Peter Johnsen, Daniel E. Adams, Henry C. Kapteyn, and Margaret M. Murnane
ET2B.2 Compact EUV & X-ray Light Sources (EUVXRAY) 2018

Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using extreme ultraviolet, coherent diffractive imaging reflectometry

Michael Tanksalvala, Yuka Esashi, Christina L. Porter, Nicholas W. Jenkins, Bin Wang, Zhe Zhang, Galen P. Miley, Naoto Horiguchi, Sadegh Yazdi, Chen-Ting Liao, Michael Gerrity, Henry C. Kapteyn, and Margaret M. Murnane
LM1F.4 Laser Science (LS) 2023

Previous Article Next Article