Optical Design of Beam Delivery System for Laser Micromachining

Min Wang; Jonny Gauvin; Maxime Savard; Sonia Verreault

doi:10.1364/COSI.2014.JTu5A.17

Classical Optics 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper JTu5A.17
•https://doi.org/10.1364/COSI.2014.JTu5A.17

Optical Design of Beam Delivery System for Laser Micromachining

Min Wang, Jonny Gauvin, Maxime Savard, and Sonia Verreault

Computational Optical Sensing and Imaging 2014

Kohala Coast, Hawaii United States
22–26 June 2014
ISBN: 978-1-55752-747-9

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Joint Poster Session (JTu5A)

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M. Wang, J. Gauvin, M. Savard, and S. Verreault, "Optical Design of Beam Delivery System for Laser Micromachining," in Classical Optics 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper JTu5A.17.

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Abstract

We present the design of a UV Beam Delivery System working at 248 nm. The system has the capability of drilling uniform 2 um hole pattern in polymer over a field of 6.5× 6.5 mm.

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