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Nanoscale-Resolution Coherent Diffractive Imaging using Tabletop Soft X-ray Light Sources

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Abstract

The combination of Coherent Diffractive Imaging (CDI) with new tabletop-scale coherent EUV and x-ray light sources has enabled a new imaging modality, with demonstrated resolution of ~20 nm and the potential for further rapid improvement.

© 2011 Optical Society of America

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