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  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CThC1
  • https://doi.org/10.1364/COSI.2009.CThC1

Sub-Surface Interferometric Near-Field Tomography

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Abstract

We describe a straightforward method to recover the sub-surface topography of coated samples with sub-diffraction limited resolution. Experimental verification is accomplished using a near-field scanning optical microscope (NSOM) operated in dual mode.

© 2009 Optical Society of America

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