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Hybrid Chalcogenide-Silicon Subwavelength Grating Waveguides Microring Resonators

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Abstract

We present the fabrication and optical measurement of hybrid chalcogenide-silicon subwavelength grating waveguides microring resonators. The ring resonators exhibit nearly athermal behavior with r/dT = –2.87 pm/K and intrinsic quality factor of Qi > 50000.

© 2021 The Author(s)

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