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Conferences > CLEO_SI > 2021 > SW3B > SW3B.2

Sidelobe-Free Beam-Steering using Optical Phased Arrays for Neural Probes

Fu-Der Chen, Youngho Jung, Tianyuan Xue, Jason C. C. Mak, Xianshu Luo, Patrick Guo-Qiang Lo, Michael L. Roukes, Joyce K. S. Poon, and Wesley D. Sacher

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Abstract

We demonstrate implantable neural probes with integrated silicon nitride optical phased arrays (OPAs) fabricated on 200mm wafers for wavelengths near 480nm. A free-propagation slab enables the emission of a single steerable beam from an OPA.

© 2021 The Author(s)

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